Carvalho, José Pacheco dePacheco, Cláudia RibeiroReis, Antonio2019-10-242019-10-242017http://hdl.handle.net/10400.6/7382Abstract—This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in a target containing a thin film deposited on a thick substrate and in a thick target.engSurface analysisComputer SimulationNuclear techniquesElastic ScatteringDepth profilingconference object