Carvalho, José Pacheco dePacheco, Cláudia RibeiroReis, Antonio2019-10-242019-10-242017http://hdl.handle.net/10400.6/7384This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method is successfully applied to depth profiling of light nuclei e. g. 12C and 18O in thick targets, using deuteron and proton induced reactions, respectively. Scanning electron microscopy is used as a complementary technique, to give information about surface topography.engSurface AnalysisComputer SimulationNuclear techniquesNuclear reactionsDepth profilingconference object