Carvalho, José Pacheco dePacheco, Cláudia RibeiroReis, António2019-10-282019-10-282019http://hdl.handle.net/10400.6/7418This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in both thin and thick targets containing Al and O.engSurface analysisComputer simulationNuclear techniquesElastic ScatteringDepth profilingconference object