Carvalho, José Pacheco dePacheco, Cláudia RibeiroReis, António2019-10-252019-10-252019http://hdl.handle.net/10400.6/7395This article is about surface analysis by nuclear techniques, which are essentially non-destructive, and computer simulation. The energy analysis method for nuclear reaction analysis is used. Elastic scattering is a particular and important case. Energy spectra are computer simulated and compared to experimental data, resulting in target composition and concentration profile information. The simulations use, mainly, target parameterization and published nuclear data. The method is successfully applied to determination of a uniform concentration profile of 12C in a thick target, through the 12C(d, p0)13C reaction. Elastic scattering of (4He)+ ions is applied to depth profiling of Zn, S in a thick target and Al, O in a thin film target respectively.engSurface analysisNuclear reaction analysisElastic scatteringComputer simulationconference object