Carvalho, Jose Pacheco dePacheco, Cláudia RibeiroReis, António2019-10-252019-10-252017978-84-697-4150-4http://hdl.handle.net/10400.6/7387This article is about computer simulation for surface analysis by nuclear techniques, which are non-destructive. The energy method of analysis is used for nuclear reactions and elastic scattering, as a particular and important case. Energy spectra are computer simulated and compared with experimental data, giving target composition and concentration profile information. The simulations use, mainly, target parameterization and available nuclear data. The method is applied to determination of an 18O concentration profile in a thick target using the 18O(p,α0)15N reaction. Elastic scattering of (4He)+ ions is applied to depth profiling of Al and Ag, Au thin films.engSurface analysisNuclear reaction analysisOxygen-18Elastic scatteringThin filmsComputer simulationconference object