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Non-destructive Microanalysis of Materials by Low Energy Ion Beams

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This work is about surface analysis of materials by low energy nuclear techniques, which are non-destructive, and computersimulation. The energy method of analysis is used for nuclear reactions and elastic scattering, as a particular and important case. Energy spectra are computer simulated and compared to experimental data, giving target composition and concentration profile information. The computations use, mainly, target parameterization and published nuclear data, namely for differential cross section and stopping power. The method is successfully applied to concentration profile determination of 12C and 18O nuclei in thick targets by deuteron and proton induced reactions, respectively. Elastic scattering of (4He)+ ions is applied to depth profiling of Al, O and Ag in thick and thin film targets.

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Surface analysis Nuclear Reaction Analysis Elastic Scattering Computer simulation

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Universidade da Beira Interior, Faculdade de Engenharia

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