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Low Energy Nuclear Techniques and Microscopy in Surface Analysis of Materials

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This article is about computer simulation for surface analysis through nuclear techniques, which are mainly non-destructive. The energy analysis method, nuclear reactions and elastic scattering are used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. Successful applications of the method are illustrated by 18O(p,α0)15N and 12C(d,p0)13C reactions and elastic scattering of (4He)+ ions, for three types of samples. SEM microscopy is used as a complementary technique for surface imaging.

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Surface Analysis Computer Simulation Nuclear Reactions Elastic Scattering Microscopy

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Sociedad de Microscopia de Espana, Sociedade Portuguesa de Microscopia

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