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Advisor(s)
Abstract(s)
This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in both thin and thick targets containing Al and O.
Description
Keywords
Surface analysis Computer simulation Nuclear techniques Elastic Scattering Depth profiling
Pedagogical Context
Citation
Publisher
Sociedade Portuguesa de Materiais