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Resumo(s)
This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in both thin and thick targets containing Al and O.
Descrição
Palavras-chave
Surface analysis Computer simulation Nuclear techniques Elastic Scattering Depth profiling