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This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method is successfully applied to depth profiling of 12C nuclei in a thick target, using the 12C(d,p0)13C deuteron induced reaction. Scanning electron microscopy is used as a complementary technique, to give information about surface topography.
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Palavras-chave
Surface analysis Computer simulation Nuclear techniques Nuclear reactions Depth profiling