| Nome: | Descrição: | Tamanho: | Formato: | |
|---|---|---|---|---|
| 1.25 MB | Adobe PDF |
Orientador(es)
Resumo(s)
Abstract—This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in a target containing a thin film deposited on a thick substrate and in a thick target.
Descrição
Palavras-chave
Surface analysis Computer Simulation Nuclear techniques Elastic Scattering Depth profiling