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| 1.25 MB | Adobe PDF |
Advisor(s)
Abstract(s)
Abstract—This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in a target containing a thin film deposited on a thick substrate and in a thick target.
Description
Keywords
Surface analysis Computer Simulation Nuclear techniques Elastic Scattering Depth profiling
Citation
Publisher
Sociedade Portuguesa de Materiais